The National Institute of Standards and Technology (NIST) is conducting market research to identify potential sources of commercial products/services that can provide high vacuum motorized stages for the computerized control of nine axes within a vacuum chamber. The stages are required to be compatible with a high vacuum system, have vacuum-compatible cabling, and meet specific requirements for rotation, speed, and resolution. The stages will be used for extreme-ultraviolet (EUV) diffractometry and EUV spectroscopic ellipsometry to measure nanoscale patterned features in support of the American semiconductor industry. • The stages must be able to rotate 360° continuously and have a clear aperture of at least 100 mm. • The stages must be compatible with a high vacuum system and have vacuum-compatible cabling. • The stages must meet specific requirements for rotation, speed, and resolution. • The vendor must provide estimates of lead time and suggest the number and type of feedthrough flanges required for all nine stages. • The vendor must indicate the available technologies for the encoders and provide mechanical drawings or 3D models of the stages.